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Brooks Instrument: a guide to innovation

Brooks Instrument was founded in 1946 and immediately the desire for innovation that distinguishes it makes it a point of reference in the sector of technologies for the control and measurement of fluids.


Brooks Instrument is a reliable partner because its flow, pressure and vaporization instrumentation is precise, reliable, solid and durable.

Brooks Instrument products have proven their quality year after year, decade after decade, even in the most demanding industrial and semiconductor manufacturing; they are able to accommodate the technological innovations of measurement and control and to follow the evolution of the times.

Brooks Instruments is:

  • One of the most trusted suppliers of mass flow technology to the global semiconductor industry.
  • Brooks holds over 150 active patents, so our product offering includes multiple patented advances in fluid measurement and control technology
  • Innovative companies such as UNIT Instruments, Tylan and Celerity, pioneers in the development of MFC technology and pressure measurement and control technology, are now part of the broad Brooks product family.
  • Many Brooks products are available with national lab calibration traceability and certification, recognized hazardous area approvals, pressure limit certifications, material certifications, and more.


The performance of our devices is fully complemented by our technical and application expertise – our instrumentation engineers and application specialists focus on solving real-world process challenges. They can help you select and configure the optimal combination of flow, pressure and vacuum devices that raise the performance and results (yield, productivity, etc.) of your systems and processes to new levels.

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